Fast optical proximity correction with timing optimization ready standard cells

Fast optical proximity correction with timing optimization ready standard cells

10.1117/12.916124

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Bibliographic Details
Main Authors: Qu, Y., Heng, C.H., Tay, A., Lee, T.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
cell-wise
design for manufacturability (DFM)
electrical performance
Optical proximity correction (OPC)
standard cell
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83733
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83733

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