Fast optical proximity correction with timing optimization ready standard cells

• Main Authors: Qu, Y., Heng, C.H., Tay, A., Lee, T.H.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: cell-wise; design for manufacturability (DFM); electrical performance; Optical proximity correction (OPC); standard cell
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83733
• Institution: National University of Singapore

10.1117/12.916124