Fast optical proximity correction with timing optimization ready standard cells

10.1117/12.916124

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Bibliographic Details
Main Authors:	Qu, Y., Heng, C.H., Tay, A., Lee, T.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	cell-wise design for manufacturability (DFM) electrical performance Optical proximity correction (OPC) standard cell
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83733
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83733
record_format	dspace
spelling	sg-nus-scholar.10635-837332023-10-26T21:22:22Z Fast optical proximity correction with timing optimization ready standard cells Qu, Y. Heng, C.H. Tay, A. Lee, T.H. ELECTRICAL & COMPUTER ENGINEERING cell-wise design for manufacturability (DFM) electrical performance Optical proximity correction (OPC) standard cell 10.1117/12.916124 Proceedings of SPIE - The International Society for Optical Engineering 8327 - PSISD 2014-10-07T04:44:33Z 2014-10-07T04:44:33Z 2012 Conference Paper Qu, Y., Heng, C.H., Tay, A., Lee, T.H. (2012). Fast optical proximity correction with timing optimization ready standard cells. Proceedings of SPIE - The International Society for Optical Engineering 8327 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.916124 9780819489838 1996756X http://scholarbank.nus.edu.sg/handle/10635/83733 000304902300034 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	cell-wise design for manufacturability (DFM) electrical performance Optical proximity correction (OPC) standard cell
spellingShingle	cell-wise design for manufacturability (DFM) electrical performance Optical proximity correction (OPC) standard cell Qu, Y. Heng, C.H. Tay, A. Lee, T.H. Fast optical proximity correction with timing optimization ready standard cells
description	10.1117/12.916124
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Qu, Y. Heng, C.H. Tay, A. Lee, T.H.
format	Conference or Workshop Item
author	Qu, Y. Heng, C.H. Tay, A. Lee, T.H.
author_sort	Qu, Y.
title	Fast optical proximity correction with timing optimization ready standard cells
title_short	Fast optical proximity correction with timing optimization ready standard cells
title_full	Fast optical proximity correction with timing optimization ready standard cells
title_fullStr	Fast optical proximity correction with timing optimization ready standard cells
title_full_unstemmed	Fast optical proximity correction with timing optimization ready standard cells
title_sort	fast optical proximity correction with timing optimization ready standard cells
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83733
_version_	1781784385871151104

Fast optical proximity correction with timing optimization ready standard cells

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