Plasma biasing to control the growth conditions of diamond-like carbon

• المؤلفون الرئيسيون: Anders A., Pasaja N., Lim S.H.N., Petersen T.C., Keast V.J.
• التنسيق: مقال
• اللغة: English
• منشور في: 2014
• الوصول للمادة أونلاين: http://www.scopus.com/inward/record.url?eid=2-s2.0-33845308546&partnerID=40&md5=13db0fce5d474bee9dc13c4f2c178ae2; http://cmuir.cmu.ac.th/handle/6653943832/5322

It is well known that the structure and properties of diamond-like carbon, and in particular the sp3/sp2 ratio, can be controlled by the energy of the condensing carbon ions or atoms. In many practical cases, the energy of ions arriving at the surface of the growing film is determined by the bias ap...