Low-bandgap, highly c-axis-oriented Al-doped ZnO thin films
© 2017 IOP Publishing Ltd. Low-bandgap transparent conductive oxides will be of interest to researchers who wish to address the health hazards of blue radiation emission from electronic displays. Here, we present a single-step, low-temperature fast enough (throughput > 60 nm min-1) process to gro...
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th-cmuir.6653943832-574812018-09-05T03:53:30Z Low-bandgap, highly c-axis-oriented Al-doped ZnO thin films Long Wen Manish Kumar Hyung Jun Cho Komgrit Leksakul Jeon Geon Han Materials Science Physics and Astronomy © 2017 IOP Publishing Ltd. Low-bandgap transparent conductive oxides will be of interest to researchers who wish to address the health hazards of blue radiation emission from electronic displays. Here, we present a single-step, low-temperature fast enough (throughput > 60 nm min-1) process to grow highly c-axis-oriented crystalline Al-doped ZnO thin films via advanced plasma processing. Dual-power DC-magnetron sputtering plasma was employed for the synthesis of thin films. The addition of top power to a pre-existing rectangular power pushed additional ions to a confined plasma and increased the plasma density and electron temperature. The effect of this additional-ion pushing was systematically studied using the microstructure, surface properties, and electronic properties. As a result, bandgap reduction from 3.35 eV to 3.10 eV and tailoring of electrical resistivity (4.89 × 10-4-8.32 × 10-3ω cm) and Seebeck coefficients (21-48 μV K-1) were achieved in addition to excellent transparency. Given their properties, the obtained films show promise for multifunctional applications, such as in UV and near-blue radiation shielding, transparent conductive electrodes and low-temperature thermoelectrics. 2018-09-05T03:43:03Z 2018-09-05T03:43:03Z 2017-04-13 Journal 13616463 00223727 2-s2.0-85018463452 10.1088/1361-6463/aa6666 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85018463452&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/57481 |
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Materials Science Physics and Astronomy Long Wen Manish Kumar Hyung Jun Cho Komgrit Leksakul Jeon Geon Han Low-bandgap, highly c-axis-oriented Al-doped ZnO thin films |
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© 2017 IOP Publishing Ltd. Low-bandgap transparent conductive oxides will be of interest to researchers who wish to address the health hazards of blue radiation emission from electronic displays. Here, we present a single-step, low-temperature fast enough (throughput > 60 nm min-1) process to grow highly c-axis-oriented crystalline Al-doped ZnO thin films via advanced plasma processing. Dual-power DC-magnetron sputtering plasma was employed for the synthesis of thin films. The addition of top power to a pre-existing rectangular power pushed additional ions to a confined plasma and increased the plasma density and electron temperature. The effect of this additional-ion pushing was systematically studied using the microstructure, surface properties, and electronic properties. As a result, bandgap reduction from 3.35 eV to 3.10 eV and tailoring of electrical resistivity (4.89 × 10-4-8.32 × 10-3ω cm) and Seebeck coefficients (21-48 μV K-1) were achieved in addition to excellent transparency. Given their properties, the obtained films show promise for multifunctional applications, such as in UV and near-blue radiation shielding, transparent conductive electrodes and low-temperature thermoelectrics. |
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Journal |
author |
Long Wen Manish Kumar Hyung Jun Cho Komgrit Leksakul Jeon Geon Han |
author_facet |
Long Wen Manish Kumar Hyung Jun Cho Komgrit Leksakul Jeon Geon Han |
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Long Wen |
title |
Low-bandgap, highly c-axis-oriented Al-doped ZnO thin films |
title_short |
Low-bandgap, highly c-axis-oriented Al-doped ZnO thin films |
title_full |
Low-bandgap, highly c-axis-oriented Al-doped ZnO thin films |
title_fullStr |
Low-bandgap, highly c-axis-oriented Al-doped ZnO thin films |
title_full_unstemmed |
Low-bandgap, highly c-axis-oriented Al-doped ZnO thin films |
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low-bandgap, highly c-axis-oriented al-doped zno thin films |
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2018 |
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https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85018463452&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/57481 |
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