Gas cooling secondary ions emitted by gas cluster ion beam at the travelling-wave ion guide of a Q-ToF-SIMS system

© 2018 Elsevier B.V. The work was aimed at using gas to cool the secondary ions emitted from gas cluster ion beam (GCIB) bombardment of biosamples for lowering the ion energy distribution and thus enhancing the detection sensitivity for secondary ion mass spectrometry (SIMS). An Ar-cluster ion sourc...

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Bibliographic Details
Main Authors: P. Thopan, T. Seki, L. D. Yu, U. Tippawan, J. Matsuo
Format: Journal
Published: 2018
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Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85050801666&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/59147
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Institution: Chiang Mai University