Fabrication techniques for an arrayed EIS biosensor

Electrolyte-Insulator-Semiconductor (EIS) based biosensors are generally exposed to liquid media that contain biological or chemical entities of specific interest. Such sensors measure change in electrical parameters such as capacitance when charged species attach to the insulator layer. It is commo...

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Bibliographic Details
Main Authors: Meng Taing, Denis Sweatman
Format: Conference Proceeding
Published: 2018
Subjects:
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=77950957378&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/59562
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Institution: Chiang Mai University