Effect of pre-heating temperature on the characteristics of PZT thin films grown by using a triol sol-gel route
Lead zirconate tilanate (PZT) films with compositions near the morphotropic phase boundary were fabricated on Pt(111)/Ti/SiO2/Si(100) using the triol sol-gel method. The effect of the pre-heating temperature on the phase transformations, microstructures, electrical properties, and ferroelectric prop...
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| Main Authors: | , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=34547288343&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/61198 |
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| Institution: | Chiang Mai University |
| Summary: | Lead zirconate tilanate (PZT) films with compositions near the morphotropic phase boundary were fabricated on Pt(111)/Ti/SiO2/Si(100) using the triol sol-gel method. The effect of the pre-heating temperature on the phase transformations, microstructures, electrical properties, and ferroelectric properties of the PZT thin films was investigated. Randomly oriented PZT thin films pre-heated at 400°C for 10 min and annealed at 600°C for 30 min showed well-defined ferroelectric hysteresis loops with a remnant polarization of 26.57 μC/cm2and a coercive field of 115.42 kV/cm. The dielectric constant and dielectric loss of the PZT films were 621 and 0.0395, respectively. The microstructures of the thin films are dense, crack-free, and homogeneous with fine grains about 15-20 nm in size. © World Scientific Publishing Company. |
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