A new design and computer simulation of a 5-electrode ion extraction/focusing system
A 13.56 MHz radio-frequency (rf) driven multicusp ion source has been constructed[1] to produce a high argon ion current density. Milliampere-range argon ion current can be extracted from the source. An in-waveguide microwave plasma source has been utilized as the ion beam neutralizer[2]. The neutra...
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| Main Authors: | , , |
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| Format: | Book Series |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=24944497808&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/62278 |
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| Institution: | Chiang Mai University |