High-precision grating period measurement

High-precision grating period measurement

© 2019 Optical Society of America We introduce a method for measuring a periodic structure, particularly a grating period. The method is based on the high-precision laser Talbot effect. The combination of a rubidium-locked external cavity diode laser and the Talbot interferometer provides an excelle...

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Bibliographic Details
Main Authors: Thanarwut Photia, Wipawee Temnuch, Sorakrai Srisuphaphon, Nuttanan Tanasanchai, Waranont Anukool, Kunaree Wongrach, Pachara Manit, Surasak Chiangga, Sarayut Deachapunya
Format: Journal
Published: 2019
Subjects:
Engineering
Physics and Astronomy
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85059768185&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/63650
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Institution: Chiang Mai University
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Summary:© 2019 Optical Society of America We introduce a method for measuring a periodic structure, particularly a grating period. The method is based on the high-precision laser Talbot effect. The combination of a rubidium-locked external cavity diode laser and the Talbot interferometer provides an excellent and simple tool for this purpose. Some experimental results are provided to demonstrate the approach.

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