SiO<inf>2</inf>-like film deposited by plasma polymerization of HMDSO + O<inf>2</inf> using repetitive high voltage pulses
© 2020, American Coatings Association. Surface properties of SiO2-like films deposited from plasma polymerization of HMDSO + O2 mixture have been investigated. Plasma of the gas mixture was produced using repetitive high voltage pulses at − 3 kV with varied frequency from 100 to 500 Hz. The films we...
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| Main Authors: | , |
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| Format: | Journal |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85087996997&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/70343 |
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| Institution: | Chiang Mai University |