Microwave plasma source as an ion beam neutralizer
Fabrication of a 13.56 MHz radio-frequency (rf) driven multicusp ion source was performed at the Fast Neutron Research Facility. The effect of the plasma neutralizer on the ion beam was investigated. A fluorescent beam profile monitor was used to measure the beam cases; with and without the neutrali...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-3042651337&partnerID=40&md5=d8ea442b7c110fbbd6192e07f36586bf http://cmuir.cmu.ac.th/handle/6653943832/7185 |
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| Institution: | Chiang Mai University |
| Language: | English |
| Summary: | Fabrication of a 13.56 MHz radio-frequency (rf) driven multicusp ion source was performed at the Fast Neutron Research Facility. The effect of the plasma neutralizer on the ion beam was investigated. A fluorescent beam profile monitor was used to measure the beam cases; with and without the neutralizer. The beam current was also measured by using a Farady cup. |
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