Electrical and optical properties of ITO/Au/ITO multilayer films for high performance TCO films

• Main Authors: Thonglem S., Intatha U., Pengpat K., Rujijanagul G., Tunkasiri T., Eitssayeam S.
• Format: Article
• Language: English
• Published: 2014
• Online Access: http://www.scopus.com/inward/record.url?eid=2-s2.0-84891773064&partnerID=40&md5=2e84710b25741f329e877f08eeae6ca7; http://cmuir.cmu.ac.th/handle/6653943832/7310
• Institution: Chiang Mai University

Effects of a sandwich metallic gold layer on electrical and optical properties of ITO films were investigated in this study. ITO/metal/ITO multilayer films were deposited on borosilicate glass using ultrasonic spray pyrolysis in air atmosphere for the ITO. The metallic layer of Au was coated via a sputtering process in the thickness range of 5-20 nm. The addition of the metallic layer enhanced conductivity, but reduced the transmittance in the multilayer films. ITO/Au/ITO multilayer films have much lower resistivity than ITO single layer film of the same thickness. The ITO/10nm Au/ITO film had the maximum figure of merit or the best performance of these samples. © 2013 Copyright Taylor and Francis Group, LLC.