Simulations of thin film growth on patterned substrates
Patterned substrate growth is a technique that layers of thin film are grown on a substrate with a predetermined pattern. A simple model is used to study patterned growth process with two different types of pattern: flat pattern and periodic pattern. The goals are to determine growth conditions that...
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Technical Report |
| Language: | English |
| Published: |
Chulalongkorn University
2008
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| Subjects: | |
| Online Access: | http://cuir.car.chula.ac.th/handle/123456789/6722 |
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| Institution: | Chulalongkorn University |
| Language: | English |