A micrograting sensor for DNA hybridization and antibody human serum Albumin-Antigen human serum albumin interaction experiments
A biosensor structure comprising silicon nitride (Si 3 N 4 ) micrograting arrays coated with a spin-on-glass (SOG) material was investigated. This grating structure was located on a silicon groove, which was etched by a deep reactive ion etching (DRIE) process. The biosensor was used as a specific...
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://repository.li.mahidol.ac.th/handle/123456789/11909 |
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| Institution: | Mahidol University |