Surface morphology of submicron crystals in aluminum nitride films grown by DC magnetron sputtering

• Main Authors: P. Limsuwan, N. Udomkan, S. Meejoo, P. Winotai
• Other Authors: King Mongkuts University of Technology Thonburi
• Format: Article
• Published: 2018
• Subjects: Physics and Astronomy
• Online Access: https://repository.li.mahidol.ac.th/handle/123456789/17183
• Institution: Mahidol University

Aluminium nitride (AlN) thin films were fabricated on a glass substrate by reactive magnetron sputtering. Raman microscopy was then employed to follow the characteristics of their optical and acoustic phonon modes. At the optimal sputtering time of 30 minutes, the defect-induced first and second ord...