Effect of gas-timing technique on structure and optical properties of sputtered zinc oxide films
Zinc oxide thin films were prepared by the RF magnetron sputtering using a gas-timing technique whereby the flow of argon into the sputtering chamber was controlled by an on-off sequence. With this technique, polycrystalline ZnO thin films on glass substrates have been achieved without any thermal t...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://repository.li.mahidol.ac.th/handle/123456789/19044 |
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| Institution: | Mahidol University |