Nickel silicide formation using multiple-pulsed laser annealing

by Setiawan, Y., Chow, F. L., Lee, Pooi See, Pey, Kin Leong, Wang, X. C., Lim, G. C.
Published 2012

Pulsed laser induced silicidation on TiN-capped Co/Si bilayers

by Chow, F. L., Lee, Pooi See, Pey, Kin Leong, Tang, L. J., Tung, Chih Hang, Wang, X. C., Lim, G. C.
Published 2012

Multiple-pulse laser thermal annealing for the formation of Co-silicided junction

by Lee, Pooi See, Pey, Kin Leong, Chow, F. L., Tang, L. J., Tung, Chih Hang, Wang, X. C., Lim, G. C.
Published 2012

Silicide formation from laser thermal processing of Ti/Co bilayers

by Chow, F. L., Pey, Kin Leong, Lee, Pooi See, Tung, Chih Hang, Wang, X. C., Lim, G. C., Chong, Y. F.
Published 2012