Note: Real time three-dimensional topography measurement of microfluidic devices with pillar structures using confocal microscope

by Ang, K.T., Fang, Z.P., Tay, A.
Published 2014

Deformation measurement of MEMS components using optical interferometry

by Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P.
Published 2014

Monitoring and control of photoresist properties and CD during photoresist processing

by Yang, G., Ngo, Y.-S., Putra, A.S., Ang, K.-T., Tay, A., Fang, Z.-P.
Published 2014

Integrated optical inspection on surface geometry and refractive index distribution of a microlens array

by Quan, C., Wang, S.H., Tay, C.J., Reading, I., Fang, Z.P.
Published 2014

Equipment design and process control of critical dimensions in lithography

by Ngo, Y.S., Yang, G., Putra, A.S., Ang, K.T., Tay, A., Fang, Z.P.
Published 2014

Development of an optical interferometer for micro-components inspection

by Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P.
Published 2014

Monitoring and control of photoresist properties and CD during photoresist processing

by Yang, G., Ngo, Y.-S., Putra, A.S., Ang, K.-T., Tay, A., Fang, Z.-P.
Published 2014