Deformation measurement of MEMS components using optical interferometry

• Main Authors: Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P.
• 其他作者: MECHANICAL ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Accelerometer; Deformation measurement; Microphone; Optical interferometry; Uncertainty evaluation
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/59849
• 機構: National University of Singapore

10.1088/0957-0233/14/7/303