Deformation measurement of MEMS components using optical interferometry
10.1088/0957-0233/14/7/303
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Main Authors: | Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59849 |
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Institution: | National University of Singapore |
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