Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry

Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry

10.1117/1.1525795

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Bibliographic Details
Main Authors: Quan, C., Wang, S.H., Tay, C.J., Liu, A.Q., Shang, H.M.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Laser interferometry
Membrane
Micro-rf switches
Nondestructive evaluation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59848
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/59848

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