Evaluation of micro-beam deflection using interferometry

10.1117/12.429583

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Bibliographic Details
Main Authors: Wang, S.H., Tay, C.J., Quan, C., Shang, H.M.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
FFT
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73438
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Institution: National University of Singapore