Evaluation of micro-beam deflection using interferometry
10.1117/12.429583
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sg-nus-scholar.10635-734382023-10-25T20:23:01Z Evaluation of micro-beam deflection using interferometry Wang, S.H. Tay, C.J. Quan, C. Shang, H.M. MECHANICAL ENGINEERING Deflection measurement FFT Interferometry MEMS Micro-beam 10.1117/12.429583 Proceedings of SPIE - The International Society for Optical Engineering 4317 262-267 PSISD 2014-06-19T05:35:07Z 2014-06-19T05:35:07Z 2001 Conference Paper Wang, S.H., Tay, C.J., Quan, C., Shang, H.M. (2001). Evaluation of micro-beam deflection using interferometry. Proceedings of SPIE - The International Society for Optical Engineering 4317 : 262-267. ScholarBank@NUS Repository. https://doi.org/10.1117/12.429583 0277786X http://scholarbank.nus.edu.sg/handle/10635/73438 000171040900042 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Deflection measurement FFT Interferometry MEMS Micro-beam |
| spellingShingle |
Deflection measurement FFT Interferometry MEMS Micro-beam Wang, S.H. Tay, C.J. Quan, C. Shang, H.M. Evaluation of micro-beam deflection using interferometry |
| description |
10.1117/12.429583 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Wang, S.H. Tay, C.J. Quan, C. Shang, H.M. |
| format |
Conference or Workshop Item |
| author |
Wang, S.H. Tay, C.J. Quan, C. Shang, H.M. |
| author_sort |
Wang, S.H. |
| title |
Evaluation of micro-beam deflection using interferometry |
| title_short |
Evaluation of micro-beam deflection using interferometry |
| title_full |
Evaluation of micro-beam deflection using interferometry |
| title_fullStr |
Evaluation of micro-beam deflection using interferometry |
| title_full_unstemmed |
Evaluation of micro-beam deflection using interferometry |
| title_sort |
evaluation of micro-beam deflection using interferometry |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73438 |
| _version_ |
1781783308048269312 |