Evaluation of micro-beam deflection using interferometry

10.1117/12.429583

Saved in:
Bibliographic Details
Main Authors: Wang, S.H., Tay, C.J., Quan, C., Shang, H.M.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
FFT
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73438
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Be the first to leave a comment!
You must be logged in first