Development of a sensor for layered micro-component measurement using white light interferometry

Development of a sensor for layered micro-component measurement using white light interferometry

10.1109/SENSORDEVICES.2010.12

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Bibliographic Details
Main Authors: Tay, C.J., Quan, C., Li, M.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Layered structures
MEMS
Micro-gear
Sensor
White light interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73340
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/73340

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