Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry

Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry

10.1117/12.970532

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Bibliographic Details
Main Authors: Ma, S., Quan, C., Zhu, R., Chen, L.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Micro-profile measurement
Transparent coating
White-light vertical scanning interferometry
Windowed Fourier Transform
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73612
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/73612

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