Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry

Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry

10.1016/j.optcom.2011.01.041

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Bibliographic Details
Main Authors: Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L., Gao, Z.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Micro-profile measurement
phase extraction
White-light scanning interferometry (WLSI)
windowed Fourier transform (WFT)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60751
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/60751

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