Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry
10.1016/j.optcom.2011.01.041
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Main Authors: | Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L., Gao, Z. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60751 |
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Institution: | National University of Singapore |
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