Resolution analysis of atomic force microscopy using temporal phase modulation interferometry

Resolution analysis of atomic force microscopy using temporal phase modulation interferometry

10.1117/1.1626126

Saved in:
Bibliographic Details
Main Authors: Ng, T.W., Sasaki, O., Chua, H.T.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Atomic force
Interferometry
Microscopy
Phase modulation
Scanning probe
Online Access:http://scholarbank.nus.edu.sg/handle/10635/50372
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/50372

Similar Items