Resolution analysis of atomic force microscopy using temporal phase modulation interferometry

Resolution analysis of atomic force microscopy using temporal phase modulation interferometry

10.1117/1.1626126

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Bibliographic Details
Main Authors: Ng, T.W., Sasaki, O., Chua, H.T.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Atomic force
Interferometry
Microscopy
Phase modulation
Scanning probe
Online Access:http://scholarbank.nus.edu.sg/handle/10635/50372
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Institution: National University of Singapore
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Summary:10.1117/1.1626126

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