Resolution analysis of atomic force microscopy using temporal phase modulation interferometry

10.1117/1.1626126

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Bibliographic Details
Main Authors:	Ng, T.W., Sasaki, O., Chua, H.T.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Atomic force Interferometry Microscopy Phase modulation Scanning probe
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/50372
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Institution:	National University of Singapore

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