Resolution analysis of atomic force microscopy using temporal phase modulation interferometry

Resolution analysis of atomic force microscopy using temporal phase modulation interferometry

10.1117/1.1626126

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Bibliographic Details
Main Authors: Ng, T.W., Sasaki, O., Chua, H.T.
Other Authors: BACHELOR OF TECHNOLOGY PROGRAMME
Format: Article
Published: 2014
Subjects:
Atomic force
Interferometry
Microscopy
Phase modulation
Scanning probe
Online Access:http://scholarbank.nus.edu.sg/handle/10635/50372
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Institution: National University of Singapore
id sg-nus-scholar.10635-50372
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spelling sg-nus-scholar.10635-503722024-11-10T07:24:20Z Resolution analysis of atomic force microscopy using temporal phase modulation interferometry Ng, T.W. Sasaki, O. Chua, H.T. BACHELOR OF TECHNOLOGY PROGRAMME MECHANICAL ENGINEERING Atomic force Interferometry Microscopy Phase modulation Scanning probe 10.1117/1.1626126 Optical Engineering 43 1 75-78 OPEGA 2014-04-22T05:57:34Z 2014-04-22T05:57:34Z 2004-01 Article Ng, T.W., Sasaki, O., Chua, H.T. (2004-01). Resolution analysis of atomic force microscopy using temporal phase modulation interferometry. Optical Engineering 43 (1) : 75-78. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1626126 00913286 http://scholarbank.nus.edu.sg/handle/10635/50372 000189106700012 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Atomic force
Interferometry
Microscopy
Phase modulation
Scanning probe
spellingShingle Atomic force
Interferometry
Microscopy
Phase modulation
Scanning probe
Ng, T.W.
Sasaki, O.
Chua, H.T.
Resolution analysis of atomic force microscopy using temporal phase modulation interferometry
description 10.1117/1.1626126
author2 BACHELOR OF TECHNOLOGY PROGRAMME
author_facet BACHELOR OF TECHNOLOGY PROGRAMME
Ng, T.W.
Sasaki, O.
Chua, H.T.
format Article
author Ng, T.W.
Sasaki, O.
Chua, H.T.
author_sort Ng, T.W.
title Resolution analysis of atomic force microscopy using temporal phase modulation interferometry
title_short Resolution analysis of atomic force microscopy using temporal phase modulation interferometry
title_full Resolution analysis of atomic force microscopy using temporal phase modulation interferometry
title_fullStr Resolution analysis of atomic force microscopy using temporal phase modulation interferometry
title_full_unstemmed Resolution analysis of atomic force microscopy using temporal phase modulation interferometry
title_sort resolution analysis of atomic force microscopy using temporal phase modulation interferometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/50372
_version_ 1821191855027519488

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