Resolution analysis of atomic force microscopy using temporal phase modulation interferometry
10.1117/1.1626126
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Main Authors: | Ng, T.W., Sasaki, O., Chua, H.T. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/50372 |
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Institution: | National University of Singapore |
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