Phase shifting white light interferometry using colour CCD for optical metrology and bio-imaging applications

• Main Authors: Upputuri, Paul Kumar, Pramanik, Manojit
• Other Authors: School of Chemical and Biomedical Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2018
• Subjects: Phase Shifting Interferometry; Optical Metrology
• Online Access: https://hdl.handle.net/10356/87722; http://hdl.handle.net/10220/44476
• Institution: Nanyang Technological University

Phase shifting white light interferometry (PSWLI) has been widely used for optical metrology applications because of their precision, reliability, and versatility. White light interferometry using monochrome CCD makes the measurement process slow for metrology applications. WLI integrated with Red-G...