Multi-colour microscopic interferometry for optical metrology and imaging applications

Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinu...

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Bibliographic Details
Main Authors: Upputuri, Paul Kumar, Pramanik, Manojit, Nandigana, Krishna Mohan, Kothiyal, Mahendra Prasad
Other Authors: School of Chemical and Biomedical Engineering
Format: Article
Language:English
Published: 2016
Subjects:
Online Access:https://hdl.handle.net/10356/80246
http://hdl.handle.net/10220/40566
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Institution: Nanyang Technological University
Language: English