Multi-colour microscopic interferometry for optical metrology and imaging applications
Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinu...
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Main Authors: | , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2016
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/80246 http://hdl.handle.net/10220/40566 |
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Institution: | Nanyang Technological University |
Language: | English |