Applications of higher-order phase shifting algorithms for multiple-wavelength metrology

• المؤلفون الرئيسيون: Upputuri, Paul Kumar, Pramanik, Manojit
• مؤلفون آخرون: School of Chemical and Biomedical Engineering
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2019
• الموضوعات: Engineering::Chemical engineering; Phase Shifting Interferometry; Multiple-wavelength
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/104906; http://hdl.handle.net/10220/49473
• المؤسسة: Nanyang Technological University

Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm,...