Applications of higher-order phase shifting algorithms for multiple-wavelength metrology

• Main Authors: Upputuri, Paul Kumar, Pramanik, Manojit
• Other Authors: School of Chemical and Biomedical Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2019
• Subjects: Engineering::Chemical engineering; Phase Shifting Interferometry; Multiple-wavelength
• Online Access: https://hdl.handle.net/10356/104906; http://hdl.handle.net/10220/49473
• Institution: Nanyang Technological University

Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm,...