Applications of higher-order phase shifting algorithms for multiple-wavelength metrology

Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm,...

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Main Authors: Upputuri, Paul Kumar, Pramanik, Manojit
其他作者: School of Chemical and Biomedical Engineering
格式: Conference or Workshop Item
語言:English
出版: 2019
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在線閱讀:https://hdl.handle.net/10356/104906
http://hdl.handle.net/10220/49473
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機構: Nanyang Technological University
語言: English

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