Applications of higher-order phase shifting algorithms for multiple-wavelength metrology
Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm,...
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Main Authors: | Upputuri, Paul Kumar, Pramanik, Manojit |
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其他作者: | School of Chemical and Biomedical Engineering |
格式: | Conference or Workshop Item |
語言: | English |
出版: |
2019
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主題: | |
在線閱讀: | https://hdl.handle.net/10356/104906 http://hdl.handle.net/10220/49473 |
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機構: | Nanyang Technological University |
語言: | English |
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