Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

Interferometers are widely used in industry for surface profiling of microsystems. It can be used to inspect both smooth (reflective) and rough (scattering) surfaces in wide range of sizes. If the object surface is smooth, the interference between reference and object beam results in visible fringes...

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Bibliographic Details
Main Authors: Upputuri, Paul Kumar, Rajendran, Praveenbalaji, Pramanik, Manojit
Other Authors: School of Chemical and Biomedical Engineering
Format: Conference or Workshop Item
Language:English
Published: 2021
Subjects:
Engineering::Bioengineering
Dual-wavelength
Interferometry
Online Access:https://hdl.handle.net/10356/146467
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Institution: Nanyang Technological University
Language: English

Internet

https://hdl.handle.net/10356/146467

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