Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

• المؤلفون الرئيسيون: Upputuri, Paul Kumar, Rajendran, Praveenbalaji, Pramanik, Manojit
• مؤلفون آخرون: School of Chemical and Biomedical Engineering
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2021
• الموضوعات: Engineering::Bioengineering; Dual-wavelength; Interferometry
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/146467
• المؤسسة: Nanyang Technological University

Interferometers are widely used in industry for surface profiling of microsystems. It can be used to inspect both smooth (reflective) and rough (scattering) surfaces in wide range of sizes. If the object surface is smooth, the interference between reference and object beam results in visible fringes...