Phase shifting white light interferometry using colour CCD for optical metrology and bio-imaging applications
Phase shifting white light interferometry (PSWLI) has been widely used for optical metrology applications because of their precision, reliability, and versatility. White light interferometry using monochrome CCD makes the measurement process slow for metrology applications. WLI integrated with Red-G...
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Main Authors: | , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2018
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Online Access: | https://hdl.handle.net/10356/87722 http://hdl.handle.net/10220/44476 |
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Institution: | Nanyang Technological University |
Language: | English |
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