A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method

A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method

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Bibliographic Details
Main Authors: Ong, K.H., Phang, J.C.H., Thong, J.T.L.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Autocorrelation
Automation
Focusing
Fourier transform
Scanning electron microscopy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54792
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/54792

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