A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method

A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method

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Bibliographic Details
Main Authors: Ong, K.H., Phang, J.C.H., Thong, J.T.L.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Autocorrelation
Automation
Focusing
Fourier transform
Scanning electron microscopy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54792
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Institution: National University of Singapore
id sg-nus-scholar.10635-54792
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spelling sg-nus-scholar.10635-547922015-01-08T18:34:40Z A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method Ong, K.H. Phang, J.C.H. Thong, J.T.L. ELECTRICAL ENGINEERING Autocorrelation Automation Focusing Fourier transform Scanning electron microscopy Scanning 20 4 324-334 SCNND 2014-06-16T09:34:51Z 2014-06-16T09:34:51Z 1998-06 Article Ong, K.H.,Phang, J.C.H.,Thong, J.T.L. (1998-06). A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method. Scanning 20 (4) : 324-334. ScholarBank@NUS Repository. 01610457 http://scholarbank.nus.edu.sg/handle/10635/54792 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Autocorrelation
Automation
Focusing
Fourier transform
Scanning electron microscopy
spellingShingle Autocorrelation
Automation
Focusing
Fourier transform
Scanning electron microscopy
Ong, K.H.
Phang, J.C.H.
Thong, J.T.L.
A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method
description Scanning
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Ong, K.H.
Phang, J.C.H.
Thong, J.T.L.
format Article
author Ong, K.H.
Phang, J.C.H.
Thong, J.T.L.
author_sort Ong, K.H.
title A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method
title_short A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method
title_full A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method
title_fullStr A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method
title_full_unstemmed A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method
title_sort robust focusing and astigmatism correction method for the scanning electron microscope - part ii: autocorrelation-based coarse focusing method
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/54792
_version_ 1681084379581906944

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