Study on the use of white light interferometry for multifiber-end surface profile measurement

Study on the use of white light interferometry for multifiber-end surface profile measurement

10.1117/1.2205892

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Bibliographic Details
Main Authors: Quan, C., Wang, S.H., Tay, C.J., Reading, I.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Michelson interferometric microscope
Microcomponents
Multifiber array
Three-dimensional whole field inspection
White light interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61419
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/61419

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