Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry

10.1016/j.optcom.2011.01.041

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Main Authors: Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L., Gao, Z.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/60751
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spelling sg-nus-scholar.10635-607512023-10-26T09:14:21Z Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry Ma, S. Quan, C. Zhu, R. Tay, C.J. Chen, L. Gao, Z. MECHANICAL ENGINEERING Micro-profile measurement phase extraction White-light scanning interferometry (WLSI) windowed Fourier transform (WFT) 10.1016/j.optcom.2011.01.041 Optics Communications 284 10-11 2488-2493 OPCOB 2014-06-17T06:26:54Z 2014-06-17T06:26:54Z 2011-05-15 Article Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L., Gao, Z. (2011-05-15). Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry. Optics Communications 284 (10-11) : 2488-2493. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optcom.2011.01.041 00304018 http://scholarbank.nus.edu.sg/handle/10635/60751 000289128600014 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Micro-profile measurement
phase extraction
White-light scanning interferometry (WLSI)
windowed Fourier transform (WFT)
spellingShingle Micro-profile measurement
phase extraction
White-light scanning interferometry (WLSI)
windowed Fourier transform (WFT)
Ma, S.
Quan, C.
Zhu, R.
Tay, C.J.
Chen, L.
Gao, Z.
Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry
description 10.1016/j.optcom.2011.01.041
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Ma, S.
Quan, C.
Zhu, R.
Tay, C.J.
Chen, L.
Gao, Z.
format Article
author Ma, S.
Quan, C.
Zhu, R.
Tay, C.J.
Chen, L.
Gao, Z.
author_sort Ma, S.
title Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry
title_short Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry
title_full Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry
title_fullStr Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry
title_full_unstemmed Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry
title_sort micro-profile measurement based on windowed fourier transform in white-light scanning interferometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/60751
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