Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry

10.1117/12.970532

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Main Authors: Ma, S., Quan, C., Zhu, R., Chen, L.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73612
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-736122024-11-13T03:58:39Z Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry Ma, S. Quan, C. Zhu, R. Chen, L. MECHANICAL ENGINEERING Micro-profile measurement Transparent coating White-light vertical scanning interferometry Windowed Fourier Transform 10.1117/12.970532 Proceedings of SPIE - The International Society for Optical Engineering 8417 - PSISD 2014-06-19T05:37:14Z 2014-06-19T05:37:14Z 2012 Conference Paper Ma, S., Quan, C., Zhu, R., Chen, L. (2012). Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry. Proceedings of SPIE - The International Society for Optical Engineering 8417 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.970532 9780819490995 0277786X http://scholarbank.nus.edu.sg/handle/10635/73612 000312964200076 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Micro-profile measurement
Transparent coating
White-light vertical scanning interferometry
Windowed Fourier Transform
spellingShingle Micro-profile measurement
Transparent coating
White-light vertical scanning interferometry
Windowed Fourier Transform
Ma, S.
Quan, C.
Zhu, R.
Chen, L.
Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry
description 10.1117/12.970532
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Ma, S.
Quan, C.
Zhu, R.
Chen, L.
format Conference or Workshop Item
author Ma, S.
Quan, C.
Zhu, R.
Chen, L.
author_sort Ma, S.
title Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry
title_short Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry
title_full Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry
title_fullStr Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry
title_full_unstemmed Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry
title_sort micro-profile measurement of a transparent coating using windowed fourier transform in white-light vertical scanning interferometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73612
_version_ 1821191354659635200