Development of a sensor for layered micro-component measurement using white light interferometry

Development of a sensor for layered micro-component measurement using white light interferometry

10.1109/SENSORDEVICES.2010.12

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Bibliographic Details
Main Authors: Tay, C.J., Quan, C., Li, M.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Layered structures
MEMS
Micro-gear
Sensor
White light interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73340
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Institution: National University of Singapore
id sg-nus-scholar.10635-73340
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spelling sg-nus-scholar.10635-733402015-02-04T22:02:12Z Development of a sensor for layered micro-component measurement using white light interferometry Tay, C.J. Quan, C. Li, M. MECHANICAL ENGINEERING Layered structures MEMS Micro-gear Sensor White light interferometry 10.1109/SENSORDEVICES.2010.12 Proceedings - 1st International Conference on Sensor Device Technologies and Applications, SENSORDEVICES 2010 21-24 2014-06-19T05:33:57Z 2014-06-19T05:33:57Z 2010 Conference Paper Tay, C.J.,Quan, C.,Li, M. (2010). Development of a sensor for layered micro-component measurement using white light interferometry. Proceedings - 1st International Conference on Sensor Device Technologies and Applications, SENSORDEVICES 2010 : 21-24. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/SENSORDEVICES.2010.12" target="_blank">https://doi.org/10.1109/SENSORDEVICES.2010.12</a> 9780769540948 http://scholarbank.nus.edu.sg/handle/10635/73340 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Layered structures
MEMS
Micro-gear
Sensor
White light interferometry
spellingShingle Layered structures
MEMS
Micro-gear
Sensor
White light interferometry
Tay, C.J.
Quan, C.
Li, M.
Development of a sensor for layered micro-component measurement using white light interferometry
description 10.1109/SENSORDEVICES.2010.12
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Tay, C.J.
Quan, C.
Li, M.
format Conference or Workshop Item
author Tay, C.J.
Quan, C.
Li, M.
author_sort Tay, C.J.
title Development of a sensor for layered micro-component measurement using white light interferometry
title_short Development of a sensor for layered micro-component measurement using white light interferometry
title_full Development of a sensor for layered micro-component measurement using white light interferometry
title_fullStr Development of a sensor for layered micro-component measurement using white light interferometry
title_full_unstemmed Development of a sensor for layered micro-component measurement using white light interferometry
title_sort development of a sensor for layered micro-component measurement using white light interferometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73340
_version_ 1681087730383060992

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