Evaluation of micro-beam deflection using interferometry
10.1117/12.429583
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Main Authors: | Wang, S.H., Tay, C.J., Quan, C., Shang, H.M. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73438 |
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Institution: | National University of Singapore |
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