Determination of a micromirror angular rotation using laser interferometric method

Determination of a micromirror angular rotation using laser interferometric method

10.1016/S0030-4018(01)01199-3

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Bibliographic Details
Main Authors: Tay, C.J., Quan, C., Wang, S.H., Shang, H.M.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Angular rotation
Laser interferometry
Micromirror
Optical MEMS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59878
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/59878

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