Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner

Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner

10.1109/OMEMS.2011.6031055

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Bibliographic Details
Main Authors: Cheo, K.K.L., Zhou, G., Du, Y., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Subjects:
angular position sensing
grating scanners
MEMS
micromirrors
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73237
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/73237

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